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Session: WEP1H9:30 AM Wednesday, June 18, 2008 Room: Hall A3 |
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Session: WEP1H | Interactive Forum: |
Chair: | Daniela Staiculescu, Georgia Institute of Technology |
Co-Chair: | Ronglin Li, Georgia Institute of Technology |
| | WEP1H-01 | Microwave Mass Flow Sensor for Process Monitoring Applications | 1157 | A. Penirschke1, A. Rijiranuwat2, H. Maune1, M. Schuessler1, R. Jakoby1, 1TU Darmstadt, Darmstadt, Germany, 2Eumetsat, Darmstadt, Germany |
| A particulates mass flow meter has been developed using a cylindrical waveguide resonator. Two directional MicroStrip-Patch couplers confine the resonant measurement section of the sensor without any disturbance of the material flow in the pipeline. A new extraction algorithm has been introduced to detect the material concentration and the velocity of particulate solids out of a single time continuous measurement. The autocorrelation function and the pre-knowledge of the time dependent phase shift, when particles flying through the sensor, where used for precise particle velocimetry. Measurements with a built up sensor at 5.5GHz where carried out to prove the concept. Application areas of this sensor type are gas/solids, gas/liquid and low loss liquid/solid flows in various industrial applications. | | |
WEP1H-02 | A Micromachined Airflow Sensor Based on RF Evanescent-Mode Cavity Resonator | 1696 | Y. Zhao, S. Kim, Y. Li, B. Pan, X. Wu, M. Tentzeris, J. Papapolymerou, M. G. Allen, Georgia Institute of Technology, Atlanta, United States |
| This paper presents an RF airflow sensor based on an evanescent-mode cavity resonator. As a sensing mechanism, an elastic membrane with a sensing beam is utilized to generate a strain on the top of the cavity resonator. The airflow deflects the sensing beam, changing the parasitic capacitance of the cavity and hence, the resonant frequency of the resonator. The cavity resonator is fabricated by micro-molding of thermal-plastic polymers enabling a low cost batch fabrication. A coplanar waveguide (CPW) feeding structure is utilized to critically couple the cavity resonator and formed simultaneously during molding process by using a metal transfer technique. The resonant frequency of the resonator as a function of the sensing beam deflection is demonstrated, and a wind tunnel test is performed to demonstrate an equivalent sensitivity of 0.36GHz/(m/s) for the airflow velocity measurement. | | |
WEP1H-03 | Pressure Micro-sensor based on Radio-Frequency Transducer | 1713 | M. M. Jatlaoui2, P. Pons1, H. Aubert2, 1Laas cnrs, Toulouse, France, 2Universite de toulouse, Toulouse, France |
| Abstract — A new type of pressure micro-sensors is reported in this communication. It is based on the use of a Radio -Frequency transducer.In the millimeter frequency range, HFSS simulation results predict a good sensitivity (~1Ghz/µm) of the resonant frequency to the applied pressure. Very first prototypes of the original pressure micro-sensor based on Radio-Frequency transducer were micro-machined and the obtained measured performances are presented here. Experimental results confirm the expected sensitivity of this new type of pressure micro-sensors. | | |
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